Ultra-High-Purity VUQSSSSD Shut-off Valve

Ultra-High-Purity VUQSSSSD Shut-off Valve

Druva UHP SeriesDruva®

Metal diaphragm shut-off valve is used in supply systems for ultra pure, inert, flammable, oxidizing, corrosive and toxic gases and gas mixtures.

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Ultra-High-Purity VUQSSSSD Shut-off ValveIntroduction

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Ultra-High-Purity VUQSSSSD Shut-off ValveFeatures

  • 1/4 turn
  • Metallic sealing system to atmosphere
  • Designed and approved in accordance with relevant sections of ISO 10297:2015
  • Cleaning, assembly and vacuum packaging according SEMI E49
  • Multi-port options available
  • For Oxygen applications - please contact factory
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Ultra-High-Purity VUQSSSSD Shut-off ValveGeneral properties

General properties

Product LinedruvaUHP - Ultra High Purity
Purity Grade6.0 (99.9999%)
Gas PropertiesPure, inert, flammable, oxidizing, corrosive, toxic
Material (main body)Stainless Steel (1.4404)
ApplicationsAnalytical laboratories, Automotive, Semiconductor
Cv-range0,30
Working temperature-20 °C to +60 °C
Inlet / outlet portsTube Stub and VCR 1/4“
Max. working pressureup to 360 psig (25 bar) | 3000 psig (207bar)
Actuating port (VUQSSSSDPARFX)1/8“ NPT female, top port
Actuating port (VUQSSSSDPARE4)M 5x0,8 mm female, side port
Valve seatPCTFE
Weight0,6 kg

Quality Standards

We comply with all relevant regulations

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